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MEMS (Micro-electro mechanical system) based thermal flow sensors are getting more importance due to their ease of fabrication, small size, and high measurement resolution. In this proposed work, a Micro-Thermal flow sensor (TFS) based on MEMS technology is designed using thin film-based thermocouples. This work mainly focuses on materials selection, and identification of fabrication process followed by design, simulation and analysis of Micro-TFS. In this work, Thermopile temperature sensor is selected for Micro-TFS to overcome the drawbacks of other Temperature sensors. Aluminium and Phosphorus materials combination is selected for the Thermopile sensor, which generates a better See-beck coefficient and produces more output voltage. Fabrication process flow based on MEMS technology is identified for Micro-TFS. This proposed flow sensor is capable to measure up to 7 LPM, for a 6 mm diameter channel in Direct-flow mode and up to 110 LPM, for a 25 mm diameter channel in By-pass flow mode.

Keywords

Thermal Flow Sensor, Thermopile, See-Beck Effect, Calorimetric, MEMS.

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References

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